Instrument Science and Technology
Program Overview
Research areas include analytical instruments, Micro-Electro-Mechanical Systems (MEMS), and optical engineering. Research in analytical instruments focuses on miniature mass spectrometry, optical spectrometry, and ion mobility spectrometry. Work in the MEMS area centers on flexible electronics, wearable devices, soft micro-robotics, and micro/nano fabrication processes. In optical engineering, research covers diffraction gratings, precision optical ranging, precision metrology, and rapid, structured-light-enabled 3D reconstruction.
We have over 8 research labs that provide graduate students with access to resources such as mass spectrometers, photo lithography, reactive-ion etching systems, and holographic lithography.
Contact
Ms. Xu / Ms. Wen
Tel: +86-755-26036356 / +86-755-26036058
E-mail: xu.mengling@sz.tsinghua.edu.cn / wen.jiamin@sz.tsinghua.edu.cn
