Li Xinghui's group makes new progress in interference lithog...
Diffraction gratings are widely used in fields such as precision measurement, laser pulse compression, and spectral analysis. As a maskless lithography method, interference lithography offers high efficiency and flexibility in the fabrication of diffraction gratings. However, the grating size achievable through interference lithography is inherently limited by the aperture of the exposure system’s optical beams, and increasing the aperture of optical elements in the system presents practical cha