Contact information

Tel: +86-13521766518


Address: Room 606, Ocean Building

Office Hours: Mon & Wed 16:00-18:00

  • 个人简历
  • 教学
  • 研究领域
  • 研究成果
  • 奖励荣誉
  • Biography


    Sep. 2014 - Oct. 2019, Ph.D. in Mechanical Engineering, McGill University, Canada

    Sep. 2012 - Aug. 2014, M.Eng. in Control Theory and Engineering, Northeastern University, China

    Sep. 2008 - Aug. 2012, B.Eng. in Automation, Northeastern University, China

    Professional Experience

    Apr. 2022 - present, Assistant Professor, Tsinghua Shenzhen International Graduate School, China

    Nov. 2019 - Mar. 2022, Postdoctoral Research Fellow (Shuimu Scholar), Tsinghua University, China

    Sept. 2017 - Sept. 2019, Research Assistant, University of Toronto, Canada

    Additional Positions

    Youth editor of Cyborg and Bionic Systems (Science Partner Journal)

    Senior member of Chinese Society of Micro-Nano Technology (CSMNT)

    Senior member of Chinese Mechanical Engineering Society (CMES)

    Member of IEEE, ASME, CSME, Chinese Institute of Electronics

    Chief consultant of Talent Linked Information Technology Co., Ltd.

    Reviewer of SCI Journals: Engineering, IEEE/ASME Transactions on Mechatronics (T-MECH), IEEE Transactions on Automation Science and Engineering (T-ASE), IEEE Robotics and Automation Letters (R-AL), Journal of Micromechanics and Microengineering (JMM)


    Personal Webpage

    Download CV

  • Current Courses

    Master’s & Ph.D. Advising

  • Research Interests

    Facing urgent fundamental scientific issues and technical bottlenecks in the fields of micro-nano engineering, precision scientific instruments and advanced manufacturing, Dr. Qu’s research group is devoted to the interdisciplinary research in areas of intelligent robots, advanced manufacturing and opto-mechatronics. The main research topics include: robotic micro-nano manipulation, SEM (scanning electronic microscope), MEMS (micro-electro-mechanical system), in-situ characterization of third-generation semiconductor nanomaterials, 3D printing and soft robots. He developed a novel robotic micro/nano-manipulation system inside SEM vacuum chamber, which could achieve synchronous and precise opto-electromechanical characterization of semiconductor nanomaterials, for versatile applications in advanced display technologies such as OLED, micro-LED, etc. Another vision of his research group is to conduct R&D of underwater MEMS-based intelligent sensing device/equipment. In addition, the group is also engaged in the development of intelligent soft swimming robots and soft gripper for underwater/ocean exploration and manipulation tasks.  


    1. Youth Fund of the National Natural Science Foundation of China (NSFC), 01/2022-12/2024, CNY 300,000, Principal Investigator.

    2. Start-up Research Fund of Tsinghua Shenzhen International Graduate School, 05/2022-04/2025, CNY 3,000,000, Principal Investigator.

    3. Open Fund of Jiangsu Key Laboratory of Advanced Manufacturing Equipment & Technology, 12/2021-12/2022, CNY 20,000, Principal Investigator.

    4. Hunan Provincial Key R&D Program, 01/2019-12/2021, CNY 800,000, Sub-Project Leader.

    5. China Postdoctoral Science Foundation, 07/2020-03/2022, CNY 80,000, Principal Investigator.

    6. Shuimu Tsinghua Scholar Program, 11/2019-11/2021, CNY 600,000, Principal Investigator.

    7. International Postdoctoral Exchange Fellowship Program (Talent-Introduction Program), 11/2019-11/2021, CNY 600,000, Principal Investigator.

    8. International Postdoctoral Exchange Fellowship Program (Academic Exchange Program), 12/2020-03/2022, CNY 20,000, Principal Investigator.

    9. Equipment R&D Project of the Natural Sciences and Engineering Research Council of Canada (NSERC), 2015-2016, CAD 147,000, Co-Principal Investigator.

    Research Output

  • Selected Publications

    (* denotes the corresponding author):

    [1] J. Qu, R. Wang, P. Pan, L. Du, Z. Mi, Y. Sun and X. Liu*, An SEM-Based Nanomanipulation System for Multiphysical Characterization of Single InGaN/GaN Nanowires, in IEEE Transactions on Automation Science and Engineering, DOI: 10.1109/TASE.2022.3146486.

    [2] Qigao Fan, Hai Zhang, Juntian Qu*, Linbo Xie, Wentao Huang, Yixin Zhu, Kaitao Bi, and Wenzhou Lu, Posture adjustment and robust microinjection of zebrafish larval heart,Review of Scientific Instruments 93, 014101 (2022).

    [3] J. Qu* and X. Liu, MEMS-Based Platforms for Multi-Physical Characterization of Nanomaterials: A Review, in IEEE Sensors Journal, vol. 22, no. 3, pp. 1827-1841, 1 Feb.1, 2022.

    [4] Juntian Qu* and Xinyu Liu, Recent Advances on SEM-based In-situ Multi-physical Characterization of Nanomaterials, Scanning, Vol. 2021, article # 4426254, 2021.

    [5] Q. Fan, P. Zhang, J. Qu, W. Huang, X. Liu and L. Xie, Dynamic Magnetic Field Generation With High Accuracy Modeling Applied to Magnetic Robots, in IEEE Transactions on Magnetics, vol. 57, no. 7, pp. 1-10, July 2021.

    [6] J. Qu, Q. Wu, T. Clancy, Q. Fan, X. Wang and X. Liu*, 3D-Printed Strain-Gauge Micro Force Sensors, IEEE Sensors Journal, vol. 20, no. 13, pp. 6971-6978, 2020.

    [7] Zhang, S., Zhai, Y., Peng, R., Shayegannia, M., Flood, A. G., Qu, J., Liu, X., Kherani, N. P., Wheeler*, Assembly of Topographical Micropatterns with Optoelectronic Tweezers,  Advanced Optical Materials, 7, 1900669, 2019.

    [8] Peng Pan, Juntian Qu, Weize Zhang, Xianke Dong, Wei Wei, Changhai Ru, and Xinyu Liu*, Robotic Stimulation of Freely Moving Drosophila Larvae Using a 3D Printed Micro Force Sensor, IEEE Sensors Journal, Vol.19, No.8, pp.3165-3173, Dec. 2018.

    [9] Juntian Qu, Renjie Wang, Yu Sun, Ishiang Shih, Zetian Mi* and Xinyu Liu*, Characterizing the Electrical Breakdown Properties of Single n-i-n-n+:GaN Nanowires, Applied Physics Letters, AIP Publishing, Vol.113, pp.193103, Nov. 2018.

    [10] Pengfei Song, Cheng Chen, Juntian Qu, Pengfei Ou, M H T Dastjerdi, Zetian Mi, Jun Song and Xinyu Liu*, Rolled-up SiOx/SiNx microtubes with an enhanced quality factor for sensitive solvent sensing, Nanotechnology, Vol.29, No.41, pp.415501, Aug. 2018.

    [11] Juntian Qu, Martin Lee, Michael Hilke and Xinyu Liu*, Investigating the impact of SEM chamber conditions and imaging parameters on contact resistance of in situ nanoprobing, Nanotechnology, Vol.28, No.34, pp.345702, Jul. 2017.

    [12] W. Zhang, J. Qu, X. Zhang, X. Liu*, A Model Compensation-Prediction Scheme for Control of Micromanipulation Systems With a Single Feedback Loop, IEEE/ASME Transactions on Mechatronics, Vol.22, No.5, pp.1973-1982, Oct. 2017.

    [13] J. Qu, W. Zhang, A. Jung, S.S.D. Cruz and X. Liu*, Microscale Compression and Shear Testing of Soft Materials Using an MEMS Microgripper With Two-Axis Actuators and Force Sensors, IEEE Transactions on Automation Science and Engineering, Vol.14, No.2, pp.834 - 843, Apr. 2017.

    [14] Juntian Qu*, Xiao Yang, and Yuchen Xiao, Dual PD Control of Flexible Smart Structure Based on LQR Algorithm, Applied Mechanics and Materials, Vol. 437, pp.634-638, Oct. 2013

    [15] Juntian Qu, Renjie Wang, Peng Pan, Linghao Do, Zetian Mi, Yu Sun, and Xinyu Liu*, An SEM-Based Nanomanipulation System for Multi-Physical Characterization of Single InGaN and GaN Nanowires, 2020 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS 2020, Oral), Las Vegas, 2020.



    [1] Juntian Qu and Zhen Zhang. An SEM-based In-situ Photoluminescence Characterization System for Semiconducting Nanowires, ZL2020111408645, 2021.

    [2] Juntian Qu and Zhen Zhang. A Surface Pressure Sensing Method on Single Semiconducting Nanowires using Protruding AFM Probe, ZL2020111875483, 2021.

    [3] Juntian Qu and Zhen Zhang. An SEM-based In-situ Opto-electro-mechanical Characterization Method of Semiconducting Nanowires, ZL202011140872X, 2020.

    [4] Liangyong Wang, Juntian Qu, Ying Chi and Tianyou Chai. A PI Control Method based on Virtual Un-modeled Dynamics Compensation for Liquid-level System, ZL2014103853078, 2017.

    [5] Yijie Liu, Zhen Zhang and Juntian Qu. An SEM-based Direct Writing Nano-Lithography System based on Compliant Nano-Servo Motion System, PCT/CN2022/072564, 2022.


  • Awards and Honors

    [1] Shenzhen “Pengcheng Peacock Project” - Class C, 2022

    [2] Youth Talent Promotion Project, Beijing Association for Science and Technology, 2021

    [3] Second Class Award for Technological Invention, China Machinery Industry Federation (CMIF), 2021

    [4] Best Picture Award, National Conference of Electron Microscopy, 2021

    [5] Second Class Award, Nano World Micro-morphology Characterization Competition, Tsinghua University, 2021

    [6] Shuimu Tsinghua Scholar, Tsinghua University, 2019

    [7] International Postdoctoral Exchange Fellowship (Talent-Introduction Program), China Postdoc Council (CPC), 2019

    [8] Quebec Merit Award, Ministry of Education, Quebec of Canada, 2014-2018

    [9] Graduate Excellence Award in Engineering, McGill University, Canada, 2014-2018