[1] Tianshi Lu, Fuyuan Deng, Yufeng Wei, Zhipeng Zeng, Xinghui Li*. Single-cycle contact-interferencehybrid lithography for scalable fabricationof arrayed quadrant micro-polarizerstructures[J]. International Journal of Extreme Manufacturing, 2025. (Accepted).(IF=21.3, JCR Q1, 中科院 1区 TOP)

[2] Can Cui, Xinghui Li*, Xiaohao Wang. Grating Interferometer: The Dominant Positioning Strategy in Atomic and Close-to-atomic Scale Manufacturing[J]. Journal of Manufacturing Systems, 2025, 82: 1227-1251. DOI: 10.1016/j.jmsy.(IF=14.2, JCR Q1, 中科院 1区 TOP)

[3] Hao Wang, Chaobo Zhang, Xiang Qian, Xiaohao Wang, Weihua Gui, Wen Gao, Xiaojun Liang, Xinghui Li*. HDRSL Net for Accurate High Dynamic Range lmaging-based Structured Light 3D Reconstruction[J]. IEEE Transactions on Image Processing, 2025, 34: 5486 - 5499. 10.1109/TIP.2025.3599934.(IF=13.7, JCR Q1, 中科院 1区 TOP)

[4] Jingwen Li, Shengtong Wang, Xinghui Li*. Cross-scale structures fabrication via hybrid lithograpkg for nanolevel positionin[J]. Microsystems & Nanoengineering, 2025, 11:163. DOI: 10.1038/s41378-025-01021-2.(IF=9.9, JCR Q1, 中科院 1区)

[5] Shuang Sun, Yijie Fu, Xiangrui Bu, Qinhao Shi, Weilong Wu, Xinghui Li, Xiaohao Wang, Quan Yu*. Sustainable Imine Production Using Alkanes as Substrates via a Plasma-Microdroplet Approach[J]. Journal of the American Chemical Society, 2025. DOI: 10.1021/jacs.5c06426.(IF=15.6, JCR Q1, 中科院 1区 TOP)

[6] Guochang Liu; Renxin Wang; Huimin Liu; Wendong Zhang; Guojun Zhang; Min Zhang,Xinghui Li, Xiaohao Wang. Design and Implementation of a 3-D Vector Hydrophone With Half-Wheatstone Bridge[J]. IEEE Sensors Journal, 2025, 25(13): 23666-23675. DOI: 10.1109/JSEN.2025.3551445.(IF=4.5, JCR Q1, 中科院 3区)

[7] Yiming Li, Weikang Chen, Zinan Li, Chaobo Zhang, Xiaohao Wang, Weihua Gui, Wen Gao, Xiaojun Liang*, Xinghui Li*. SL3D-BF: A real-world structured light 3D dataset with background-to-foreground enhancement[J]. IEEE Transactions on Circuits and Systems for Video Technology, 2025. DOI: 10.1109/TCSVT.2025.3571417.(IF=11.1, JCR Q1, 中科院 1区 TOP)

[8] Yiming Li, Zinan Li, Weikang Chen, Chaobo Zhang, Hao Wang, Xiaohao Wang, Weihua Gui, Wen Gao,  Xiaojun Liang, Xinghui Li. Reliable 3D Reconstruction with Single-Shot Digital Grating and Physical Model-Supervised Machine Learning[J]. IEEE Transactions on Instrumentation and Measurement, 2025. DOI: 10.1109/TIM.2025.3575974.(IF=5.9, JCR Q1, 中科院 2区)

[9] Can Cui#, Lvye Gao#, Pengbo Zhao, Menghan Yang, Lifu Liu, Yu Ma, Guangyao Huang, Shengtong Wang, Linbin Luo, Xinghui Li*. Towards multi-dimensional atomic-level measurement: integrated heterodyne grating interferometer with zero dead-zone[J]. Light: Advanced Manufacturing, 2025, 6, 40. DOI: 10.37188/lam.2025.040.(IF=10.6, JCR Q1)

[10] Jiao Bai*, Huaming Chen, Junguang Chen, Haowei Yang, Xinghui Li, Yan Shi, Jiangfeng Song. Normal incident optical reflectance spectroscopy for thin-film thickness measurement with genetic algorithm[J]. Measurement, 2025, 256, 118511. DOI: 10.1016/j.measurement.2025.118511.(IF=5.6, JCR Q1, 中科院 2区)

[11] Hao Wang, Ziyu Lu, Ziyang Huang, Yiming Li, Chaobo Zhang, Xiang Qian, Xiaohao Wang, Weihua Gui, Xiaojun Liang*, Xinghui Li*. A high-accuracy and reliable end-to-end phase calculation network and its demonstration in high dynamic range 3D reconstruction[J]. Nanomanufacturing and Metrology, 2025, 8(5): 1-19. DOI: 10.1007/s41871-025-00248-x.(IF=4.5, JCR Q1, 中科院 4区)

[12] Hao Wang, Xiyu He, Chaobo Zhang, Xiaojun Liang, Peiyuan Zhu, Xiaohao Wang, Weihua Gui, Xinghui Li*, Xiang Qian*. Accelerating surface defect detection using normal data with an attention-guided feature distillation reconstruction network[J]. Measurement, 2025, 246: 116702. DOI: 10.1016/j.measurement.2025.116702.(IF=5.6, JCR Q1, 中科院 2区)

[13] Xiang Gao, Jingwen Li, Zijian Zhong, Xinghui Li*. Global alignment reference strategy for laser interference lithography pattern arrays[J]. Microsystems & Nanoengineering, 2025, 11: 41. DOI: 10.1038/s41378-025-00889-4.(IF=9.9, JCR Q1, 中科院 1区 TOP)

[14] Linbin Luo, Feifan Cao, Shengtong Wang, Xinghui Li*. Design and demonstration of a large range precision grating sensor for simultaneous measurement of out-of-plane motions[J]. Measurement, 2025, 249: 116799. DOI: 10.1016/j.measurement.2025.116799.(IF=5.6, JCR Q1, 中科院 2区)

[15] Zijian Zhong, Jingwen Li, Tianshi Lu, Xinghui Li*. High dynamic wavefront stability control for high-uniformity periodic microstructure fabrication[J]. Precision Engineering, 2025, 93: 216-223. DOI: 10.1016/j.precisioneng.2025.01.006.(IF=3.7, JCR Q1, 中科院 2区)

[16] Boliang Li, Mengfang Liu, Xiaohao Wang, Xinghui Li*. An adaptive plug-and-play online extrinsic calibration approach for LiDAR-camera fusion[J]. Measurement, 2025, 248: 116877. DOI: 10.1016/j.measurement.2025.116877.(IF=5.6, JCR Q1, 中科院 2区)

[17] Guangyao Huang#, Can Cui#, Xiaoyang Lei, Qixue Li, Shuhua Yan, Xinghui Li, Guochao Wang*. A review of optical interferometry for high-precision length measurement[J]. Micromachines, 2025, 16(6): 16010006. DOI: 10.3390/mi16010006.(IF=3, JCR Q2, 中科院 3区)

[18] Linbin Luo#, Shuonan Shan#, Xinghui Li*. A Review: Laser interference lithography for diffraction gratings and their applications in encoders and spectrometers[J]. Sensors, 2024, 24: 6617. DOI: 10.3390/s24206617.(IF=3.5, JCR Q2, 中科院 3区)

[19] Min Han, Hao Jiang, Fengxiao Lei, Yibo Xing, Xiaohao Wang, Xinghui Li*. Modeling window smoothing effect hidden in fringe projection profilometry[J]. Measurement, 2025, 242: 115852. DOI: 10.1016/j.measurement.2024.115852.(IF=5.6, JCR Q1, 中科院 2区)

[20] Ruijie Ma, Chen Li, Yibo Xing, Siyao Wang, Rui Ma, Feng Feng, Xiang Qian, Xiaohao Wang, Xinghui Li*. Defect focused Harris3D & boundary fine-tuning optimized region growing: Lithium battery pole piece defect segmentation[J]. Measurement, 2025, 242: 116147. DOI: 10.1016/j.measurement.2024.116147.(IF=5.6, JCR Q1, 中科院 2区)

[21] 韩民, 张琛萍, 张宗华*, 李星辉*. MEMS 振镜式结构光三维重建综述[J]. 光学精密工程, 2025, 33(7): 1065-1090. DOI: 10.37188/OPE.20253307.1065.

Min Han, Chenping Zhang, Zonghua Zhang*, Xinghui Li*. Review of MEMS vibration-mirror-based 3D reconstruction of structured light[J]. Optics and Precision Engineering, 2025, 33(7): 1065-1090. DOI: 10.37188/OPE.20253307.1065.

[22] 李星辉*, 曹非凡, 周紫依, 王晓浩. 面向仪器领域研究生素质课程教学模式的探索与实践[J]. 高教学刊, 2025, 21: 24-31. DOI：10.19980/j.CN23-1593/G4.2025.21.006.(IF=2.4, JCR Q,1 中科院 3区)

Xinghui Li*, Feifan Cao, Ziyi Zhou, Xiaohao Wang. exploration and practice of postgraduate teaching in competence course of instrument industry[J]. Journal of Higher Education, 2025, 21: 24-31. DOI: 10.19980/j.CN23-1593/G4.2025.21.006.(IF=2.4, JCR Q1, 中科院 3区)

[23] 马瑞, 吴柏荣, 李保文, 李星辉*. 基于光谱共焦原理的大深径比内孔参数旋转测量方法[J]. 激光与光电子学进展, 2025, 62(7), 0712003: 1-9. DOI: 10.3788/LOP242214.(IF=1, JCR Q4, 中科院 3区)

Rui Ma, Borong Wu, Baowen Li, Xinghui Li*. A rotating measurement method of large depth to diameter ratio inner hole parameters based on spectral confocal principle[J]. Laser & Optoelectronics Progress, 2025, 62(7), 0712003: 1-9. DOI: 10.3788/LOP242214.(IF=1, JCR Q4, 中科院 3区)

[24] Cong Liu, Chaobo Zhang, Xiaojun Liang, Zhiming Han, Yiming Li, Chunhua Yang, Weihua Gui, Wen Gao, Xiaohao Wang, Xinghui Li*. Attention Mono-depth: attention-enhanced transformer for monocular depth estimation of volatile kiln burden surface[J]. IEEE Transactions on Circuits and Systems for Video Technology, 2024, 35(2): 1686-1699. DOI: 10.1109/TCSVT.2024.3479412.(IF=11.1, JCR Q1, 中科院 1区 TOP)

[25] Min Han, Yibo Xing, Xiaohao Wang, Xinghui Li*. Projection superimposition for the generation of high-resolution digital grating[J]. Optics Letters, 2024, 49(15): 4473-4476. DOI: 10.1364/OL.531846.(IF=3.3, JCR Q2, 中科院 2区)

[26] Shuang Sun, Qinhao Shi , Xinghui Li*, Xiaohao Wang, Quan Yu*. Microdroplet-accelerated cycloaddition of gaseous phenylacetylene and indoline derivatives to form tricyclic quinolines[J]. Chemical Engineering Journal, 2024, 495: 153179. DOI: 10.1016/j.cej.2024.153179.(IF=13.2, JCR Q1, 中科院 1区 TOP )

[27] Yiming Li#, Zinan Li#, Haozhen Huang, Qian Xiang, Feng Feng, Xiaojun Liang, Chaobo Zhang, Xiaohao Wang, Weihua Gui, Xinghui Li*. Global phase accuracy enhancement of structured light system calibration and 3D reconstruction by overcoming inevitable unsatisfactory intensity modulation[J]. Measurement, 2024, 114952. DOI: 10.1016/j.measurement.2024.114952.(IF=5.6, JCR Q1, 中科院 2区)

[28] Fengxiao Lei, Ruijie Ma, Xinghui Li*. Use of phase-angle model for full-field 3D reconstruction under efficient local calibration[J]. Sensors, 2024, 24, 2581. DOI: 10.3390/s24082581.(IF=3.5, JCR Q2, 中科院 3区)

[29] Baihan Chen, Qiaolin Li, Rui Ma, Xiang Qian, Xiaohao Wang, Xinghui Li*. Towards the generalization of time series classification: A feature-level styletransfer and multi-source transfer learning perspective[J]. Knowledge-Based Systems, 2024, 299: 112057. DOI: 10.1016/j.knosys.2024.112057.(IF=7.6, JCR Q1, 中科院 1区 TOP)

[30] Guochao Wang#*, Lvye Gao#, Guangyao Huang, Xiaoyang Lei, Can Cui, Shengtong Wang, Mingyue Yang, Junhao Zhu, Shuhua Yan, Xinghui Li*. A wavelength-stabilized and quasi-common-path heterodyne grating interferometer with sub-nanometer precision[J]. IEEE Transactions on Instrumentation and measurement, 2024, 73: 7002509. DOI: 10.1109/TIM.2024.3372212.(IF=5.9, JCR Q1, 中科院 2区)

[31] Chen Li, Xiakai Pan, Peiyuan Zhu, Shidong Zhu, Chengwei Liao, Haoyang Tian, Xiang Qian, Xiu Li, Xiaohao Wang, Xinghui Li*. Style Adaptation module: Enhancing detector robustness to inter-manufacturer variability in surface defect detection[J]. Computers in Industry, 2024, 157-158: 104084. DOI: 10.1016/j.compind.2024.104084.(IF=9.1, JCR Q1, 中科院 1区 TOP)

[32] Shengtong Wang, Rui Ma, Feifan Cao, Linbin Luo, Xinghui Li*. A Review: High-Precision Angle Measurement Technologies[J]. Sensors, 2024, 24: 1755. DOI: 10.3390/s24061755.(IF=3.5, JCR Q2, 中科院 3区)

[33] Fengxiao Lei, Min Han, Hao Jiang, Xiaohao Wang, Xinghui Li*. A phase-angle inspired calibration strategy based on MEMS projector for 3D reconstruction with markedly reduced calibration images and parameters[J]. Optics and Lasers in Engineering, 2024, 176: 108078. DOI: 10.1016/j.optlaseng.2024.108078.(IF=3.7, JCR Q2, 中科院 2区)

[34] Shengtong Wang, Linbin Luo, Xinghui Li*. Design and Parameter Optimization of Zero Position Code Considering Difraction Based on Deep Learning Generative Adversarial Networks[J]. Nanomanufacturing and Metrology, 2024, 7: 2. DOI: 10.1007/s41871-023-00221-6.(IF=4.5, JCR Q1, 中科院 4区)

[35] 李星辉*, 李博亮, 曾龙. 人工智能时代研究生机器人课程教学模式探索[J]. 高教学刊, 2024, 36: 59-62, 67. DOI: 10.19980/j.CN23-1593/G4.2024.36.014.(IF=2.4, JCR Q1, 中科院 3区)

Xinghui Li*, Boliang Li, Long Zeng. Exploration of teaching mode of postgraduate robot course in the era of artificial intelligence[J]. Journal of Higher Education, 2024, 36: 59-62, 67. DOI: 10.19980/j.CN23-1593/G4.2024.36.014.(IF=2.4, JCR Q1, 中科院 3区)

[36] 陆天石, 邓富元, 李星辉*. 一维亚波长红外偏振光栅全息光刻加工[J]. 光学精密工程, 2024, 32(21): 3147-3156. DOI: 10. 37188/OPE. 20243221. 3147.

Tianshi Lu, Fuyuan Deng, Xinghui Li*. Holographic lithography of one-dimensional subwavelength infrared polarization gratings[J]. Optics and Precision Engineering, 2024, 32(21): 3147-3156. DOI: 10.37188/OPE. 20243221. 3147.

[37] 李星辉*, 崔璨. 光栅干涉精密纳米测量技术[J]. 光学精密工程, 2024, 32(17): 2591-2611. DOI: 10. 37188/OPE. 20243217. 2591.

Xinghui Li*, Can Cui. Grating interferometric precision nanometric measurement technology[J]. Optics and Precision Engineering, 2024, 32(17): 2591-2611. DOI: 10. 37188/OPE. 20243217. 2591.

[38] 王国超，黄光耀，朱凌晓，李星辉*，颜树华. 780 nm 波段高分光比消偏振分光片的制备及测试[J]. 光学精密工程, 2023, 31(21): 3088-3095. DOI: 10. 37188/OPE. 20233121. 3088.

Guochao Wang, Guangyao Huang, Lingxiao Zhu, Xinghui Li*, Shuhua Yan*. Fabrication and performance evaluation of nonpolarizing beam splitter with high splitting ratio in 780 nm band[J]. Optics and Precision Engineering, 2023, 31(21): 3088-3095. DOI: 10. 37188/OPE. 20233121. 3088.

[39] Yiming Li, Zhuang Li, Chaobo Zhang, Min Han, Fengxiao Lei, Xiaojun Liang*, Xiaohao Wang, Weihua Gui, Xinghui Li*. Deep learning-driven one-shot dual-view 3D reconstruction for dual-projector system[J]. IEEE Transactions on Instrumentation and measurement, 2023.(IF=5.9, JCR Q1, 中科院 2区) 

[40] Qiaolin Li, Yuki Shimizu, Xiaohao Wang, Xinghui Li*, Wei Gao. High-accuracy roundness measurement of small cylindrical workpieces by a high-frequency filtering method[J]. Precision Engineering, 2024, 85: 241-246.(IF=3.7, JCR Q1, 中科院 2区)

[41] Kaiheng Huang, Qiaolin Li*, Kaixiong Zhu, Baihan Chen, Xiang Qian, Xiaohao Wang, Xinghui Li. A through-transmission ultrasonic method for the detection of ferrite tile defects[J]. Applied Sciences, 2023, 13: 11172. (IF=2.5, JCR Q2, 中科院 4区)

[42] Min Han, Weijian Shi, Shihao Lu, Fengxiao Lei, Yiming Li, Xiaohao Wang, Xinghui Li*. Internal–External Layered Phase Shifting for Phase Retrieval[J].  IEEE Transactions on Instrumentation and measurement, 2023, 73: 4501013.(IF=5.9, JCR Q1, 中科院 2区)

[43] Shuonan Shan#, Jingwen Li#, Peiyuan Liu, Qiaolin Li*, Xiaohao Wang, Xinghui Li*. A microlens array grating for miniature multi-channel spectrometers[J]. Sensors, 2023, 23: 8381. (IF=3.5, JCR Q2, 中科院 3区)

[44] Qiaolin Li, Yifeng Wang, Jingwen Li, Xiaohao Wang, Xinghui Li*. Non-contact ultra-precision metrology of superfine cylinders with a developed two-dimensional coordinate measuring device[J]. Measurement, 2023, 223: 113727.(IF=5.6, JCR Q1, 中科院 2区)

[45] Guangyao Huang#, Jiao Bai#, Feng Feng, Long Zeng, Pingfa Feng, Xinghui Li*. A hybrid strategy for profile measurement of micro gear teeth[J]. Micromachines, 2023, 14:1729. (IF=3, JCR Q2, 中科院 3区)

[46] Min Han, Jiangming Kan, Gongping Yang, Xinghui Li*. Robust ellipsoid fitting using combination of axial and sampson distances[J]. IEEE Transactions on Instrumentation and measurement, 2023, 72: 2526714. (IF=5.9, JCR Q1, 中科院 2区)

[47] 白蛟, 李婧雯, 王晓浩, 李星辉*. 高精度光谱共焦位移测量技术研究进展[J].激光与光电子学进展, 2023, 60(3): 221-236.(IF=1, JCR Q4, 中科院 3区)

Jiao Bai, Jingwen Li, Xiaohao Wang, Xinghui Li*. Research Progress of high precision chromatic confocal displacement measurement technology[J]. Laser & Optoelectronics Progress, 2023, 60(3): 221-236.(IF=1, JCR Q4, 中科院 3区)

[48] Gaopeng Xue, Liyu Lin, Qihang Zhai, Chuang Zeng, Xiaohao Wang, Xinghui Li*. Development of dielectric-film-based polarization modulation scheme for patterning highly uniform 2D array structures with periodic tunability[J]. Optics and Lasers in Engineering, 2023, 167: 107627.(IF=3.7, JCR Q2, 中科院 2区)

[49] Shengtong Wang, Baiqi Liao, Ningning Shi, Xinghui Li*. A compact and high-precision three-degree-of-freedom grating encoder based on a quadrangular frustum pyramid prism[J]. Sensors, 2023, 23(8): 4022.(IF=3.5, JCR Q2, 中科院 3区)

[50] Chen Li, Haoxin Yan, Xiang Qian, Shidong Zhu, Peiyuang Zhu, Chengwei Liao, Haoyang Tian, Xiu Li, Xiaohao Wang, Xinghui Li*. A domain adaptation YOLOv5 model for industrial defect inspection[J]. Measurement, 2023, 213: 112725.(IF=5.6, JCR Q1, 中科院 2区)

[51] Min Han, Fengxiao Lei, Weijian Shi, Shihao Lu, Xinghui Li*. Uniaxial MEMS-based 3D reconstruction using pixel refinement[J]. Optics Express, 2023, 31(1): 536-554.(IF=3.3, JCR Q2, 中科院 2区)

[52] Shengtong Wang, Linbin Luo, Junhao Zhu, Ningning Shi, Xinghui Li*. An ultra-precision absolute-type multi-degree-of-freedom grating encoder[J]. Sensors, 2022, 22(23): 9047.(IF=3.5, JCR Q2, 中科院 3区)

[53] Feng Feng, Kexin Zhang, Xinghui Li*, Yousheng Xia,, Meng Yuan, Pingfa Feng*. Scaling region of weierstrass-mandelbrot function: improvement strategies for fractal ideality and signal simulation[J]. Fractal and Fractional, 2022, 6(10): 100542.(IF=3.3, JCR Q1, 中科院 2区)

[54] Gaopeng Xue, Masaya Toda, Bing Li, Xinghui Li*, Takahito Ono. Demonstration of heterogeneous structure for fabricating a comb-drive actuator for cryogenic applications[J]. Micromachines, 2022, 13(8): 1287.(IF=3, JCR Q2, 中科院 3区)

[55] Shounan Shan, Peiyuan Liu, Jingwen Li, Jiao Bai, Xiaohao Wang, Xinghui Li*. Fabrication of a micro lens array-grating for a miniature spectrometer[C]. Optical Design and Testing XII, SPIE, 2022, 12315: 325-334.

[56] Yifeng Wang, Ningning Shi, Liyong Li, Kai Ni, Xinghui Li*. Instantaneous grating signal subdivision system with non-linear kalman filters[C]. Optical Design and Testing XII, SPIE, 2022, 12315: 90-96.

[57] Qiuying Ma, Haoyang Yu, Qian Zhou, Xinghui Li*, Guanhao Wu, Kai Ni. A 209 MHz compact all-fiber er-doped mode-locked laser[C]. Advanced Lasers, High-power Lasers, and Applications XIII, SPIE, 2022, 12310: 70-75.

[58] Fuyuan Deng, Tianshi Lu, Qihang Zhai, Linbin Luo, Gaopeng Xue, Qian Zhou, Xiaohao Wang, Xinghui Li*. A four-step laser interference lithography for patterning pixelated micro-polarizer array[C]. Holography, Diffractive Optics, and Applications XII, SPIE, 2022, 12318: 349-355.

[59] Linbin Luo, Lyuye Gao, Shengtong Wang, Fuyuan Deng, Yonggui Wu, Xinghui Li*. An ultra-precision error estimation for a multi-axes grating encoder using quadrant photodetectors[C]. Optical Metrology and Inspection for Industrial Applications IX, SPIE, 2022, 12319: 57-65.

[60] Weijian Shi, Shihao Lu, Yihao Tao, Gaopeng Xue, Fengxiao Lei, Xinghui Li*. FPGA enabled accurate angle-power matching method in MEMS mirrors-based structure light projection system[C]. Optical Metrology and Inspection for Industrial Applications IX, SPIE, 2022, 12319: 30-35.

[61] Shengtong Wang, Junhao Zhu, Ningning Shi, Linbin Luo, Yanxiang Wen, Xinghui Li*. Modeling and test of an absolute Four-degree-of-freedom (DOF) Grating Encoder[C]. Optical Metrology and Inspection for Industrial Applications IX, SPIE, 2022, 12319: 72-78.

[62] Qiuying Ma, Haoyang Yu, Qian Zhou, Xinghui Li*, Guanhao Wu, Kai Ni. A mode-locked fiber laser simulation platform for self-tuning algorithm optimization[C]. Optoelectronic Devices and Integration XI, SPIE, 2022, 12314, 130-134.

[63] Min Han, Fengxiao Lei, Yihao Tao, Weijian Shi, Shihao Lu, Haoyang Tian, Chengwei Liao, Peiyuan Zhu, Shidong Zhu, Xiaohao Wang, Xinghui Li*. A novel calibration method for a uniaxial MEMS-based 3D reconstruction system[C]. Optoelectronic Imaging and Multimedia Technology IX, SPIE, 2022, 12317, 40-46.

[64] Junhao Zhu, Guochao Wang, Shengtong Wang, Xinghui Li*. A Reflective-Type Heterodyne Grating Interferometer for Three-Degree-of-Freedom Subnanometer Measurement[J]. IEEE Transactions on Instrumentation and Measurement, 2022, 71: 7007509.(IF=5.9, JCR Q1, 中科院 2区)

[65] 朱俊豪, 汪盛通, 李星辉*. 面向光刻机晶圆台的超精密光栅定位技术[J]. 激光与光电子学进展, 2022, 59(9): 320-336. 特邀综述(IF=1, JCR Q4, 中科院 3区)

Junhao Zhu, Shengtong Wang, Xinghui Li*. Ultraprecision grating positioning technology for wafer stage of lithography machine[J]. Laser & Optoelectronics Progress, 2022, 59(9): 320-336. (Invited Review)(IF=1, JCR Q4, 中科院 3区)

[66] 李一鸣, 杨霖, 王晓浩, 单硕楠, 邓富元, 贺志学, 刘政通, 李星辉*. 光刻套刻误差测量技术[J]. 激光与光电子学进展, 2022, 59(9): 391-402. 特邀综述(IF=1, JCR Q4, 中科院 3区)

Yiming Li, Lin Yang, Xiaohao Wang, Shuonan Shan, Fuyuan Deng, Zhixue He, Zhengtong Liu, Xinghui Li*. Overlay metrology for lithography machine[J]. Laser & Optoelectronics Progress, 2022, 59(9): 391-402. (Invited Review)(IF=1, JCR Q4, 中科院 3区)

[67] Ruiming Chen, Yiming Li, Gaopeng Xue*, Yihao Tao, Xinghui Li*. Laser triangulation measurement system with Scheimpflug calibration based on the Monte Carlo optimization strategy[J]. Optics Express, 2022, 30(14): 25290-25307.(IF=3.3, JCR Q2, 中科院 2区)

[68] Jiao Bai, Jingwen Li, Xiaohao Wang, Qian Zhou, Kai Ni and Xinghui Li*. A new method to measure spectral reflectance and film thickness using a modified chromatic confocal sensor[J]. Optics and Lasers in Engineering, 2022, 154: 107019.(IF=3.7, JCR Q2, 中科院 2区)

[69] Feng Feng, Meng Yuan, Yousheng Xia, Haoming Xu, Pingfa Feng, Xinghui Li*. Roughness scaling extraction accelerated by dichotomy-binary strategy and its application to milling vibration signal[J]. Mathematics, 2022, 10(7): 1105.(IF=2.2, JCR 1Q, 中科院 4区)

[70] Jiao Bai, Yingzuo Wang, Xiaohao Wang, Qian Zhou, Kai Ni, Xinghui Li*. Three-probe error separation with chromatic confocal sensors for roundness measurement[J]. Nanomanufacturing and Metrology, 2021, 4: 247-255.(IF=4.5, JCR Q1, 中科院 4区)

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